| 摘要: |
| 超导微波平面腔作为多种量子比特的读出方式及实现多比特长程耦合的媒介,已成为固态量子信息处理领域的研究热点。相比于传统的Al腔,MoRe腔不容易氧化,使得MoRe腔能够更加方便地用于机械振子、石墨烯超导结等实验研究中。同时由于第二类超导体MoRe合金具有临界温度高、临界磁场大等优异性质,这使得MoRe合金超导微波平面腔可以在4.2 K的液氦环境下工作,而且这种腔能够工作在更高磁场的环境下。因此本文设计并且仿真了MoRe合金微波平面腔的结构,探索了MoRe微波平面腔的微纳加工工艺(包括磁控溅射镀膜、光刻及干法刻蚀),解决了制备过程中出现的金属孤岛等工艺问题,成功制备出在20 mK的环境下值高达28000的MoRe合金超导微波平面腔。 |
| 关键词: MoRe合金 超导微波平面腔 微纳加工工艺 |
| DOI： |
| 投稿时间：2018-10-18修订日期：2018-10-18 |
| 基金项目: |
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| Fabrication of MoRe alloy microwave planar cavity* |
|
yuan long
|
| (Key Laboratory of quantum information, Chinese Academy of Sciences) |
| Abstract: |
| Microwave planar cavity has become the research hotpot since it can be used as detector of qubits and the media of realizing long distance coupling between quantum bits. Compared with traditional Al cavity, MoRe alloy cavity is not easily oxidized, which makes it more convenient for device fabrications for experiments of mechanical resonator, grapheme superconductivity junction. At the same time, the type Ⅱ superconductor MoRe alloy has high critical temperature, high critical magnetic field and other excellent properties. This allows the MoRe superconducting microwave planar cavity to operate in a liquid helium environment of 4.2 K, and the cavity can operate in a higher magnetic field environment. Here we designed and simulated the structure of MoRe alloy microwave plane cavity.We also explored the micro-nano processing technology of MoRe microwave plane cavity (including magnetron sputter, photolithography and dry etching), solved the key technical details (metal islands). Finally we demonstrated a MoRe microwave planar cavity with a Q value up to 28000 at 20 mK. |
| Key words: MoRe alloy microwave planar cavity micro- and nano- fabrication |