| 摘要: |
| 超导共面波导谐振腔主要包括四分之一波长型和半波长型。本文对半波长超导共面波导谐振腔使用并联RLC电路进行等效分析，使用sonnet软件进行仿真其传输特性，通过电子束蒸发和激光直写等工艺制备出样品，在低温超导状态下使用矢量网络分析仪对其传输特性进行测量，以及通过持续降温方式研究其传输特性受温度的影响。实验表明：测得的谐振频率和外部品质因数与设计值吻合；谐振频率受动态电感的影响随温度降低而升高；外部品质因数随温度降低而保持基本不变；内部品质因先受导体损耗的影响随温度降低而急剧升高，当温度降低至一定温度后内部品质因数受介电损耗的影响随温度降低而保持基本不变；总品质因数在温度较高时主要来自于导体损耗，在温度较低时主要来自于介电损耗和外部品质因数，随温度的变化趋势和内部品质因数一致 |
| 关键词: 超导共面波导谐振腔，半波长，磁场穿透深度，动态电感，铝膜 |
| DOI： |
| 投稿时间：2019-06-25修订日期：2019-06-25 |
| 基金项目: |
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| Study on half wavelength superconducting coplanar waveguide resonator and the effect of the tempreture on its transmission characteristics |
|
Wang Qiao, Zhou Ming
|
| (East China Institute of Computer Technology) |
| Abstract: |
| The superconducting coplanar waveguide(CPW) resonator mainly includes quarter wavelength type and half wavelength type.In this paper, the parallel RLC circuit is used for equivalent analysis of the half-wavelength superconducting coplanar waveguide resonator, and sonnet software is used to simulate its transmission characteristics. Samples are prepared by electron beam evaporation and laser direct writing, and their transmission characteristics are measured by vector network analyzer in ultra-low temperature state.The effect of the tempreture on transmission characteristics is studied by continuous cooling.The experimental results show that When the temperature decreases, the resonance frequency increases with the influence of dynamic inductance;the external quality factor keeps almost unchanged with the decrease of temperature;When the temperature decreases,the internal quality factor first rises sharply with the influence of conductor loss, and then keeps almost unchanged after the tempreture decreases to a certain degree at which time dielectric loss is dominant;The total quality factor mainly comes from the conductor loss when temperature is higher,while it comes from the dielectric loss and the external quality factor when the temperature is lower.The change trend of the total quality factor with the temperature is almost the same with that of the internal quality factor. |
| Key words: Superconducting coplanar waveguide resonators, half wavelength, magnetic field penetration depth, dynamic inductor, aluminum film |