| 摘要: |
| 单电子晶体管是一种非常重要的器件，在量子计算、电荷探测领域具有重要应用。由于其尺寸极小，很容易受到静电的影响导致损坏，并且对于测试条件要求苛刻，制备与观测较为困难。本文用双角度蒸发的方法制备了SET，在稀释制冷机的10 mK极低温度下，对SET的基本性能进行了测试和表征。针对制备、运输、测试以及安装的全流程提出了一整套静电防护方案。 |
| 关键词: 单电子晶体管，双角度蒸发，约瑟夫森结，静电防护 |
| DOI： |
| 投稿时间：2020-03-29修订日期：2020-03-29 |
| 基金项目:国家重点基础研究发展计划(批准号：2011CBA00304）和国家自然科学基金重点项目(批准号：60836001)资助的课题 |
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| The Fabrication and Measurement of Single Electron Transistor |
|
wuxiaoyu1, zhaohu2, lizhi1
|
| (1.College of electronics and information engineering, Sichuan University;2.AVIC Xi’an automatic control research institute) |
| Abstract: |
| Single electron transistor(SET) is a very important device, which has an important application in the field of quantum computation and charge detection. Because of its small size, it is easy to be damaged by static electricity, and the test conditions are very demanding, so it is difficult to fabricate and observe. In this paper, the SET is fabricated by two angle evaporation. The basic properties of the SET are tested and characterized at the extremely low temperature of 10mK in dilution refrigerator. For the whole process of fabrication, transportation, testing and installation, a set of electrostatic protection scheme is proposed. |
| Key words: SET, two angle evaporation, Josephson junction, Electrostatic protection |